Tailor-made functionalization of silicon nitride surfaces

A. Arafat, C.G.P.H. Schroën, L.C.P.M. de Smet, E.J.R. Sudhölter, H. Zuilhof

Research output: Contribution to journalArticleAcademicpeer-review

63 Citations (Scopus)


This communication presents the first functionalization of a hydrogen-terminated silicon-rich silicon nitride (Si3Nx) surface with a well-defined, covalently attached organic monolayer. Properties of the resulting monolayers are monitored by measurement of the static water contact angle, X-ray photoelectron spectroscopy (XPS), and infrared reflection absorption spectroscopy (IRRAS). Further functionalization was performed by reaction of Si3Nx with a trifluoroethanol ester alkene (CH2=CH-(CH2)8CO2CH2CF3) followed by basic hydrolysis to afford the corresponding carboxylic acid-terminated monolayer with hydrophilic properties. These results show that Si3Nx can be functionalized with a tailor-made organic monolayer, has highly tunable wetting properties, and displays significant potential for further functionalization.
Original languageEnglish
Pages (from-to)8600-8601
JournalJournal of the American Chemical Society
Issue number28
Publication statusPublished - 2004


  • hydrogen-terminated silicon
  • alkyl monolayers
  • 1-alkenes

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