A facile approach for the fabrication of large-scale interdigitated nanogap electrodes (nanogap IDEs) with a controllable gap was demonstrated with conventional micro-fabrication technology to develop chemocapacitors for gas sensing applications. In this work, interdigitated nanogap electrodes (nanogap IDEs) with gaps from 50-250 nm have been designed and processed at full wafer-scale. These nanogap IDEs were then coated with poly(4-vinyl phenol) as a sensitive layer to form gas sensors for acetone detection at low concentrations. These acetone sensors showed excellent sensing performance with a dynamic range from 1000 ppm to 10 ppm of acetone at room temperature and the observed results are compared with conventional interdigitated microelectrodes according to our previous work. Sensitivity and reproducibility of devices are discussed in detail. Our approach of fabrication of nanogap IDEs together with a simple coating method to apply the sensing layer opens up possibilities to create various nanogap devices in a cost-effective manner for gas sensing applications.
Minh, Q. N., Tong, H. D., Kuijk, A., van de Bent, F., Beekman, P., & Van Rijn, C. J. M. (2017). Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration. RSC Advances, 7(79), 50279-50286. https://doi.org/10.1039/c7ra09441h