Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology

Hoa Pham, T. Kulrattanarak, R.G.M. van der Sman, C.G.P.H. Schroën, R.M. Boom, P.M. Sarro

Research output: Chapter in Book/Report/Conference proceedingConference paperAcademic

1 Citation (Scopus)


This paper presents the design, fabrication and testing of deterministic ratchets which are used for fractionation purpose. Ratchets with different configuration are prepared to determine particle trajectories with different sizes. Silicon based MEMS technology is used to fabricate devices containing arrays of obstacles with varying size, spacing and number. The arrays of high aspect ratio, 7-20um wide, silicon pillars are defined and etched in 60 to 80¿ deep microchannels using Deep Reactive Ion Etching (DRIE). The working modes of the ratchets are demonstrated using colloidal suspensions of latex particles which have an average diameter ranging between 2 and 6um
Original languageEnglish
Title of host publicationProceedings of the Eurosensors XXIII conference, Lausanne, Switzerland, 6-9 September 2009
EditorsJ. Brugger, D. Briand
Publication statusPublished - 2009
EventThe Eurosensors XXIII conference, Lausanne, Switzerland -
Duration: 6 Sep 20099 Sep 2009


ConferenceThe Eurosensors XXIII conference, Lausanne, Switzerland

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