Covalent biofunctionalization of silicon nitride surfaces

A. Arafat, M. Giesbers, M. Rosso, E.J.R. Sudhölter, C.G.P.H. Schroën, R.G. White, Li Yang, M.R. Linford, H. Zuilhof

Research output: Contribution to journalArticleAcademicpeer-review

71 Citations (Scopus)


Covalently attached organic monolayers on etched silicon nitride (SixN4; x 3) surfaces were prepared by reaction of SixN4-coated wafers with neat or solutions of 1-alkenes and 1-alkynes in refluxing mesitylene. The surface modification was monitored by measurement of the static water contact angle, XPS, IRRAS, AFM, and ToF-SIMS, and evidence for the formation of Si-C bonds is presented. The etching can be achieved by dilute HF solutions and yields both Si-H and N-H moieties. The resulting etched SixN4 surfaces are functionalized by terminal carboxylic acid groups in either of two ways: (a) via attachment of a 10-undecenoic acid 2,2,2-trifluoroethyl ester (trifluoro ethanol ester) and subsequent thermal acid hydrolysis; (b) through attachment of a photocleavable ester, and subsequent photochemical cleavage, as this would allow photopatterned functionalized SixN4. The carboxylic acids are successfully used for the attachment of oligopeptides (aspartame) and complete proteins using EDC/NHS chemistry. Finally, an amino-terminated organic monolayer can be formed by reaction of HF-treated SixN4 surfaces with a N-(-undecylenyl)phthalimide, which yields an amino-terminated surface upon deprotection with hydrazine.
Original languageEnglish
Pages (from-to)6233-6244
Publication statusPublished - 2007


  • hydrogen-terminated silicon
  • self-assembled monolayers
  • ion mass-spectrometry
  • laser interference lithography
  • tof-sims spectra
  • alkyl monolayers
  • multivariate-analysis
  • organic monolayers
  • porous silicon
  • scribed silicon


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