Chemical modification of wear-resistant surfaces for photolithography.

Pujari, Sidharam (PhD candidate)
Zuilhof, Han (Promotor)
van Rijn, Cees (Promotor)

Project: PhD

1 internal PhD, WU

1 results

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2013
Covalently bound fluorine-containing monolayers on silicon and oxides : formation, stability and tribology
Pujari, S. P., 2013, S.l.. 304 p.
Research output: Thesis › internal PhD, WU

Open Access