Chemical modification of wear-resistant surfaces for photolithography.

Pujari, Sidharam (PI)
Zuilhof, Han (CoI)
van Rijn, Cees (CoI)

Organic Chemistry

Project: PhD

Project Details

Status	Finished
Effective start/end date	1/09/09 → 6/09/13

1 internal PhD, WU

Covalently bound fluorine-containing monolayers on silicon and oxides : formation, stability and tribology
Pujari, S. P., 2013, S.l.. 304 p.
Research output: Thesis › internal PhD, WU

Open Access