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Chemical modification of wear-resistant surfaces for photolithography.
Pujari, Sidharam
(PhD candidate)
Zuilhof, Han
(Promotor)
van Rijn, Cees
(Promotor)
Organic Chemistry
VLAG
Department of Agrotechnology and Food Sciences
Project
:
PhD
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
1/09/09
→
6/09/13
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Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Tribology
Material Science
100%
Silicon
Material Science
100%
Monolayers
Material Science
100%
Oxide Compound
Material Science
100%
Olefin
Chemical Engineering
100%
Silicon Carbide
Chemical Engineering
100%
Microelectromechanical System
Chemical Engineering
100%
Polyether Ether Ketones
Chemical Engineering
100%
Research output
Research output per year
2013
2013
2013
1
internal PhD, WU
Research output per year
Research output per year
Covalently bound fluorine-containing monolayers on silicon and oxides : formation, stability and tribology
Pujari, S. P.
,
6 Sept 2013
, S.l..
304 p.
Research output
:
Thesis
›
internal PhD, WU
Open Access
Silicon
100%
Monolayers
100%
Tribology
100%
Oxide Compound
100%
Olefin
100%