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Chemical modification of wear-resistant surfaces for photolithography.
Pujari, Sidharam
(PI)
Zuilhof, Han
(CoI)
van Rijn, Cees
(CoI)
Organic Chemistry
Project
:
PhD
Status
Finished
Effective start/end date
1/09/09
→
6/09/13
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Research Output
Covalently bound fluorine-containing monolayers on silicon and oxides : formation, stability and tribology
Research output
:
Thesis
›
internal PhD, WU